Semiconductor integrated circuit including a power supply, semiconductor system including a semiconductor integrated circuit, and method of forming a semiconductor integrated circuit

ABSTRACT

Provided are a semiconductor integrated circuit including a power supply, a semiconductor system including the semiconductor integrated circuit, and a method of forming the semiconductor integrated circuit. The semiconductor integrated circuit includes: a semiconductor substrate on a surface of which a plurality of electrical circuits and a plurality of power pads are mounted; an insulation layer stacked on the semiconductor substrate; a first conductive layer connected to a first power pad by a first via and stacked on the insulation layer; a second conductive layer connected to a second power pad by a second via, stacked on the insulation layer, and separated from the first insulation layer; and a power generation layer stacked on the first conductive layer and the second conductive layer and that generates voltage.

PRIORITY STATEMENT

This application is a divisional of U.S. application Ser. No.11/447,943, filed Jun. 7, 2006 now U.S. Pat. No. 7,675,158 which claimsthe priority of Korean Patent Application No. 10-2005-0052739, filed onJun. 18, 2005, in the Korean Intellectual Property Office, the entirecontents of which is incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Example embodiments of the present invention relate to a semiconductorintegrated circuit, a semiconductor system, and a method of forming asemiconductor integrated circuit; and more particularly, to asemiconductor integrated circuit including a power supply, asemiconductor system including the semiconductor integrated circuit, anda method of forming the semiconductor integrated circuit.

2. Description of the Related Art

Conventional semiconductor integrated circuits have increasingly becomesmaller and more highly integrated. Accordingly, semiconductorintegrated circuits having a diversity of functions can be integratedinto a single semiconductor system. For example, semiconductor systemsused in mobile phones include high-power radio frequency (RF) integratedcircuits that require a high voltage of, for example, approximately 3 V,and memory and/or logic integrated circuits that require a low voltageof, for example, approximately 1.2 V.

FIG. 1 illustrates a conventional semiconductor system 100, and FIG. 2illustrates another conventional semiconductor system 200.

Referring to FIG. 1, a conventional semiconductor system 100 may includea plurality of integrated circuits S_IC1 through S_IC3 that performdifferent functions and a power supply PS that applies voltage to theintegrated circuits S_IC1 through S_IC3. The power supply PS may be aself-generating power supply.

Referring to FIG. 2, a conventional semiconductor system 200 may includea plurality of integrated circuits S_IC1 through S_IC3 that performdifferent functions, a power supply B that applies voltage to theintegrated circuits S_IC1 through S_IC3, and a charger C that may supplyelectric charge to the power supply B.

A power supply B, which is not a self-generating power supply, mayreceive electric charge from an external source through a charger C andmay apply voltage to the integrated circuits S_IC1 through S_IC3.

As illustrated in FIGS. 1 and 2, in conventional semiconductor systems100, 200, the integrated circuits S_IC1, S_IC2, S_IC3 receive voltagefrom the shared power supplies PS and B. In the conventional systems100, 200, the following problems may arise.

Conventionally, power supplies PS, B occupy a large amount of spaceinside semiconductor systems 100, 200 making it difficult to add moreintegrated circuits to semiconductor systems 100, 200 without increasingthe size of the semiconductor systems and/or to scale down thesemiconductor systems 100, 200. Furthermore, because integrated circuitsS_IC1, S_IC2, S_IC3 may be disposed close to each other, temperaturesinside the conventional semiconductor systems 100, 200 may increase.

As described above, integrated circuits S_IC1, S_IC2, S_IC3 inconventional semiconductor systems 100, 200 share power supplies PS, B.Accordingly, an integrated circuit that consumes most of the power, forexample, a CPU, may limit the lifespan of the power supplies PS, B.

For example, in notebooks or mobile phones, a CPU or atransmitting/receiving device typically consumes most of the power.Further, in conventional semiconductor systems 100, 200 as illustratedin FIGS. 1 and 2, the power supplies PS, B provide power for all of theintegrated circuits S_IC1, S_IC2, S_IC3, and thus when the powersupplies PS, B are exhausted, all of the integrated circuits S_IC1,S_IC2, S_IC3 lose power substantially simultaneously.

Further, because a power supply is shared by integrated circuits thatmay or may not cause a significant amount of noise and/or integratedcircuits that are sensitive and/or insensitive to noise, the overallperformance of a semiconductor system may be limited by an integratedcircuit having the worst noise characteristics.

SUMMARY OF THE INVENTION

An example embodiment of the present invention provides a semiconductorintegrated circuit including a dedicated power supply.

An example embodiment of the present invention provides a semiconductorsystem including a plurality of semiconductor integrated circuits, eachincluding a dedicated power supply.

An example embodiment of the present invention provides a method offorming a semiconductor integrated circuit including a dedicated powersupply.

An example embodiment of the present invention provides a semiconductorintegrated circuit. The semiconductor integrated circuit may include asemiconductor substrate on a surface of which a plurality of electricalcircuits and a plurality of power pads are mounted; an insulation layerstacked on the semiconductor substrate; a first conductive layerconnected to a first power pad by a first via and stacked on theinsulation layer; a second conductive layer connected to a second powerpad by a second via, stacked on the insulation layer, and separated fromthe first conductive layer; and a power generation layer which isstacked on the first conductive layer and second conductive layer andgenerates voltage.

According to an example embodiment of the present invention, a firstconductive layer and a first via form a first integrated wiringstructure, and a second conductive layer and a second via form a secondintegrated wiring structure.

According to an example embodiment of the present invention, a powergeneration layer may be a material that generates voltage on its own.One of the power pads is a power supply pad, and another of the powerpads is connected to a ground.

An example embodiment of the present invention provides a semiconductorintegrated circuit. The semiconductor integrated circuit may include asemiconductor substrate on a surface of which a plurality of electricalcircuits and a plurality of power pads are mounted; a first insulationlayer stacked on the semiconductor substrate; a first conductive layerwhich is connected to a first power pad by a first via and stacked onthe first insulation layer; a second conductive layer which is connectedto a second power pad by a second via, stacked on the first insulationlayer, and separated from the first conductive layer; a secondinsulation layer stacked on the first conductive layer and the secondconductive layer; and a third conductive layer which is connected to thefirst conductive layer by a third via and stacked on the secondinsulation layer.

According to an example embodiment of the present invention, a firstconductive layer, a second conductive layer, a third conductive layer,and a second insulation layer form a capacitor.

An example embodiment of the present invention provides a semiconductorintegrated circuit. The semiconductor integrated circuit may include asemiconductor substrate on a surface of which a plurality of electricalcircuits and a plurality of power pads are mounted; an insulation layerstacked on the semiconductor substrate; and a battery which is stackedon the insulation layer and applies voltage to the power pads through avia. The battery may be a solar cell and/or a material thatself-generates voltage.

An example embodiment of the present invention provides a semiconductorintegrated circuit. The semiconductor integrated circuit may include asemiconductor substrate on a surface of which a plurality of electricalcircuits and a plurality of power pads are mounted; an insulation layerstacked on the semiconductor substrate; and a capacitor which is stackedon the insulation layer, stores electric charge supplied from anexternal source, and applies voltage to the power pads through a via.

An example embodiment of the present invention provides a semiconductorsystem. The semiconductor system may include a plurality ofsemiconductor integrated circuits, wherein each semiconductor integratedcircuit includes a voltage generator which applies an appropriatevoltage to a corresponding power pad through a via.

According to an example embodiment of the present invention, a powerprovider may be a battery or a material that self-generates voltage. Thepower provider may be a capacitor and/or a carbon nano-tube which storeselectric charge supplied from an external source and applies voltage tothe power pads through a via.

According to an example embodiment of the present invention, asemiconductor system may further include an electric charge generatorwhich supplies electric charge to the power provider.

An example embodiment of the present invention provides a method forforming a semiconductor integrated circuit. The method may include aforming a plurality of electrical circuits and a plurality of power padson a semiconductor substrate; forming an insulation layer on thesemiconductor substrate; forming a first conductive layer which isconnected to a first power pad by a first via on the insulation layer;forming a second conductive layer on the insulation layer, wherein thesecond conductive layer is connected to a second power pad by a secondvia and separated from the first conductive layer; and forming a powerprovider for generating voltage on the first conductive layer and thesecond conductive layer.

An example embodiment of the present invention provides a method forforming a semiconductor integrated circuit. The method may includeforming a plurality of electrical circuits and a plurality of power padson a semiconductor substrate; forming a first insulation layer on thesemiconductor substrate; forming a first conductive layer which isconnected to a first power pad by a first via on the first insulationlayer; forming a second conductive layer on the first insulation layer,wherein the second conductive layer is connected to a second power padby a second via and separated from the first conductive layer; forming asecond insulation layer on the first conductive layer and the secondconductive layer; and forming a third conductive layer on secondinsulation layer, wherein the third conductive layer is connected to thefirst conductive layer by a third via.

An example embodiment of the present invention provides a semiconductorsystem. The semiconductor system may include at least one semiconductorsubstrate; a plurality of electrical circuits and a plurality of powerpads arranged on each of the at least one semiconductor substrate; aninsulation layer arranged on the at least one semiconductor substrateand the plurality of electrical circuits and the plurality of powerpads; at least one conductive layer arranged on the insulation layer;and a power provider arranged on the at least one conductive layer andconfigured to provide power to at least one of the plurality of powerpads.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and/or other features and/or advantages of the presentinvention will become more apparent by describing in detail exampleembodiments of the present invention with reference to the attacheddrawings in which:

FIG. 1 illustrates a conventional semiconductor system;

FIG. 2 illustrates a conventional semiconductor system;

FIG. 3 illustrates a semiconductor system according to an exampleembodiment of the present invention;

FIGS. 4A through 4C illustrate a method of forming a semiconductorintegrated circuit according to an example embodiment of the presentinvention;

FIG. 5 illustrates a semiconductor system according to an exampleembodiment of the present invention;

FIGS. 6A through 6C illustrate a method of forming a semiconductorintegrated circuit according to an example embodiment of the presentinvention; and

FIG. 7 illustrates a semiconductor integrated circuit according to anexample embodiment of the present invention.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS OF THE PRESENT INVENTION

Various example embodiments of the present invention will now bedescribed more fully with reference to the accompanying drawings inwhich some example embodiments of the invention are shown. In thedrawings, the thicknesses of layers and/or regions may be exaggeratedfor clarity.

Accordingly, while example embodiments of the invention are capable ofvarious modifications and alternative forms, embodiments thereof areshown by way of example in the drawings and will herein be described indetail. It should be understood, however, that there is no intent tolimit example embodiments of the invention to the particular formsdisclosed, but on the contrary, example embodiments of the invention areto cover all modifications, equivalents, and alternatives falling withinthe scope of the invention. Like numbers refer to like elementsthroughout the description of the figures.

It will be understood that, although the terms first, second, etc. maybe used herein to describe various elements, these elements should notbe limited by these terms. These terms are only used to distinguish oneelement from another. For example, a first element could be termed asecond element, and, similarly, a second element could be termed a firstelement, without departing from the scope of the present invention. Asused herein, the term “and/or” includes any and all combinations of oneor more of the associated listed items.

It will be understood that when an element is referred to as being“connected” or “coupled” to another element, it can be directlyconnected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as being “directlyconnected” or “directly coupled” to another element, there are nointervening elements present. Other words used to describe therelationship between elements should be interpreted in a like fashion(e.g., “between” versus “directly between”, “adjacent” versus “directlyadjacent”, etc.).

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of exampleembodiments of the invention. As used herein, the singular forms “a”,“an” and “the” are intended to include the plural forms as well, unlessthe context clearly indicates otherwise. It will be further understoodthat the terms “comprises”, “comprising,”, “includes” and/or“including”, when used herein, specify the presence of stated features,integers, steps, operations, elements, and/or components, but do notpreclude the presence or addition of one or more other features,integers, steps, operations, elements, components, and/or groupsthereof.

It should also be noted that in some alternative implementations, thefunctions/acts noted may occur out of the order noted in the FIGS. Forexample, two FIGS. shown in succession may in fact be executedsubstantially concurrently or may sometimes be executed in the reverseorder, depending upon the functionality/acts involved.

FIG. 3 illustrates a semiconductor system 300 according to an exampleembodiment of the present invention. Referring to FIG. 3, asemiconductor system 300 may include a plurality of semiconductorintegrated circuits S_IC1A, S_IC2A, S_IC3A. Because all semiconductorintegrated circuits S_IC1A, S_IC2A, S_IC3A may have a similar and/oridentical structure, the structure and operation of semiconductorintegrated circuit S_IC1A will be described as an example.

Referring to FIG. 3, a semiconductor integrated circuit S_IC1A mayinclude a semiconductor substrate SUB (see FIG. 4) on a surface of whicha plurality of electrical circuits 41 (see FIG. 4) and power pads VCC_P,GND_P (see FIG. 4) may be mounted; an insulation layer I1 (see FIG. 4)that may be stacked on the semiconductor substrate SUB; and a battery B1which may be stacked on the insulation layer I1 and may apply voltage topower pads VCC_P, GND_P through vias V1, V2 (see FIG. 4). Thesemiconductor substrate SUB and insulation layer 11 are collectivelyindicated as reference numeral S1 (see FIG. 4).

A battery B1 may be a solar power battery and/or a material that mayself-generate voltage.

According to an example embodiment of the present invention, asemiconductor integrated circuit S_IC1A may include a power provider(e.g., a voltage generator) that provides power to the semiconductorintegrated circuit S_IC1A.

In an example embodiment of the present invention, because semiconductorintegrated circuits S_IC1A, S_IC2A, S_IC3A do not share a common voltagegenerator, the lifespan of each voltage generator may vary according tothe usage of each semiconductor integrated circuit. Accordingly, overallnoise characteristics of a semiconductor system 300 according to anexample embodiment of the present invention may not be affected by thenoise characteristics of each semiconductor integrated circuit.

In addition, because voltage generators may be included in and/orarranged on each semiconductor integrated circuit in a semiconductorsystem according to an example embodiment of the present invention, thesize of a semiconductor system 300 may be reduced and/or moresemiconductor chips may be integrated into semiconductor system 300. Thestructure and operation of semiconductor integrated circuit S_IC1Aaccording to an example embodiment of the present invention will befurther described with reference to FIGS. 4A through 4C.

FIGS. 4A through 4C illustrate a method of forming a semiconductorintegrated circuit S_IC1A of FIG. 3 according to an example embodimentof the present invention.

Referring to FIGS. 3 and 4A through 4C, a semiconductor integratedcircuit S_IC1A may include a semiconductor substrate SUB on a surface ofwhich electrical circuits 41 and power pads VCC_P, GND_P may be mounted;an insulation layer I1 which may be stacked on the semiconductorsubstrate SUB; a first conductive layer M1 which may be connected to afirst power pad VCC_P by via V1 and stacked on the insulation layer I1;a second conductive layer M2 which may be connected to a second powerpad GND_P by via V2, stacked on insulation layer I1, and separated fromthe first conductive layer M1; and a power generation layer P which maybe stacked on the first and second conductive layers M1, M2 and maygenerate voltage.

According to an example embodiment of the present invention, electricalcircuits 41 and power pads VCC_P, GND_P may be formed on a semiconductorsubstrate SUB (see FIG. 4A). The electrical circuits 41 may be logiccircuits that implement functions of a semiconductor integrated circuitS_IC1A. The first power pad VCC_P may be a power supply pad and thesecond power pad GND_P may be connected to a ground.

An insulation layer I1 may be formed on the electrical circuits 41 andthe power pads VCC_P, GND_P (see FIG. 4A). A first conductive layer M1connected to a first power pad VCC_P by a via V1 may be formed on theinsulation layer I1 (see FIG. 4B). The first conductive layer M1 and thevia V1 connected to the first conductive layer M1 may form a firstintegrated wiring structure.

Because a method of forming the via V1 and first conductive layer M1 onthe insulation layer I1 to form a first integrated wiring structure isknown to those of ordinary skill in the art, a detailed descriptionthereof is omitted herein for the sake of brevity.

A second conductive layer M2 connected to a second power pad GND_P,which, in turn, may be connected to ground by a via V2 and separate froma first conductive layer M1 may be formed on insulation layer I1 (seeFIG. 4B). The second conductive layer M2 and via V2 connected to thesecond conductive layer M2 may form a second integrated wiring.

Because a method of forming a via V2 and a second conductive layer M2 onthe insulation layer I1 to form the second integrated wiring is known tothose of ordinary skill in the art, its detailed description is alsoomitted for the sake of brevity.

First conductive layer M1 and second conductive layer M2 may beconductive metallic materials and/or equivalents thereof.

According to an example embodiment of the present invention, a powergeneration layer P that generates voltage may be formed on the first andsecond conductive layers M1, M2 (see FIG. 4C). A power generation layerP may be a material that self-generates, for example, the powergeneration layer P may be a solar cell.

A power generation layer P may generate a voltage on its own and mayapply the voltage to a first power pad VCC_P through a first conductivelayer M1 and a via V1. A voltage applied to a first power pad VCC_P of asemiconductor integrated circuit S_IC1A by a power generation layer Pmay be used to operate electrical circuits 41 of a semiconductorintegrated circuit S_IC1A. A power generation layer P and first andsecond conductive layers M1, M2 may collectively form a battery B1 asillustrated in an example embodiment of the present invention as shownin FIG. 3.

According to an example embodiment of the present invention, asemiconductor integrated circuit S_IC1A having a structure as describedabove may vary the lifespan of power generation layer P according tofunctions of the semiconductor integrated circuit S_IC1A.

FIG. 5 illustrates a semiconductor system according to an exampleembodiment of the present invention. Referring to FIG. 5, asemiconductor system 500 may include a plurality of semiconductorintegrated circuits S_IC1B, S_IC2B, S_IC3B and an electric chargegenerator C that may supply electric charge to the semiconductorintegrated circuits S_IC1B, S_IC2B, S_IC3B through a conductive signalline EC. The conductive signal line EC may be a patterned printedcircuit board (PCB) patterned on a motherboard (not shown) mountingsemiconductor integrated circuits S_IC1B, S_IC2B, S_IC3B and/or anequivalent conductive transmission line.

Unlike the semiconductor integrated circuits S_IC1A, S_IC2A, S_IC3A ofan example embodiment of the present invention shown in FIG. 3,semiconductor integrated circuits S_IC1B, S_IC2B, S_IC3B as shown inFIG. 5 may receive electric charge from an external electric chargegenerator C. According to an example embodiment of the presentinvention, the semiconductor integrated circuits S_IC1B, S_IC2B, S_IC3Bmay receive and store electric charge and may generate voltage. Anelectric charge generator C may be any device that generates electriccharge on its own and/or receives electric charge from an externalsource and supplies the electric charge to the power pads of asemiconductor integrated circuit S_IC1B. A charger for charging mobiledevices, for example, mobile phones is one example of an electric chargegenerator.

Because each of the semiconductor integrated circuits S_IC1B, S_IC2BS_IC3B may have a similar and/or identical structure according to anexample embodiment of the present invention, a structure and operationof a semiconductor integrated circuit S_IC1B will be described as anexample.

Referring to FIG. 5, a semiconductor integrated circuit S_IC1B mayinclude a semiconductor substrate SUB (see FIG. 6) on a surface of whichelectrical circuits 61 (see FIG. 6) and power pads VCC_P, GND_P (seeFIG. 6) may be mounted; a first insulation layer I1, (see FIG. 6) whichmay be stacked on the semiconductor substrate SUB; and a capacitor CAP1which may be stacked on the first insulation layer I1, may storeelectric charge supplied from an external source, and may apply voltageto power pads VCC_P, GND_P through vias V1, V2, V3. In FIG. 5, asemiconductor substrate SUB and a first insulation layer I1 arecollectively indicated as reference numeral S1.

In a semiconductor integrated circuit S_IC1B according to an exampleembodiment of the present invention, a power provider (e.g., voltagegenerator), which may receive and store electric charge supplied from anexternal source and may generate and/or apply a voltage to thesemiconductor integrated circuit S_IC1B, is mounted on a semiconductorchip. A voltage generator according to an example embodiment of thepresent invention may be a capacitor and/or a carbon nano tube.

In an example embodiment of the present invention as shown in FIG. 5,because semiconductor integrated circuits S_IC1B, S_IC2B, S_IC3B do notshare a voltage generator, the lifespan of each voltage generator mayvary according to the usage of each semiconductor integrated circuit.Accordingly, the overall noise characteristics of semiconductor system500 may not be affected by the noise characteristics of eachsemiconductor integrated circuit within the semiconductor system 500.

In addition, because the voltage generators are included and/or arrangedon each semiconductor integrated circuit, the size of the semiconductorsystem 500 may be reduced and/or more semiconductor circuits may beintegrated into semiconductor system 500. The structure and operation ofa semiconductor integrated circuit S_IC1B according to an exampleembodiment of the present invention will be further described withreference to FIG. 5.

FIGS. 6A through 6C illustrate a method of forming semiconductorintegrated circuit S_IC1B of FIG. 5 according to an example embodimentof the present invention.

Referring to FIGS. 5 and 6A through 6C, a semiconductor integratedcircuit S_IC1B may include a semiconductor substrate SUB on the surfaceof which electrical circuits 61 and power pads VCC_P, GND_P may bemounted; a first insulation layer I1 which may be stacked on thesemiconductor substrate SUB; a first conductive layer M1 which may beconnected to a first power pad VCC_P by a via V1 and may be stacked onthe first insulation layer I1; a second conductive layer M2 which may beconnected to a second power pad GND_P by a via V2, stacked on the firstinsulation layer I1, and separated from the first conductive layer M1;second insulation layer I2 which may be stacked on the first conductivelayer M1 and the second conductive layer M2; and a third conductivelayer M3 which may be connected to the first conductive layer M1 by avia V3 and may be stacked on the second conductive layer M2.

According to an example embodiment of the present invention, electricalcircuits 61 and power pads VCC_P, GND_P may be formed on thesemiconductor substrate SUB (see FIG. 6A). The electrical circuits 61may be logic circuits that may implement functions of a semiconductorintegrated circuit S_IC1B. A first power pad VCC_P may be a power supplypad and a second power pad GND_P may be connected to a ground.

A first insulation layer I1 may be formed on the electrical circuits 61and the power pads VCC_P, GND_P (see FIG. 6A). A first conductive layerM1 connected to a first power pad VCC_P by a via V1 may be formed on afirst insulation layer I1 (see FIG. 6B). The first conductive layer M1and the via V1 connected to the first conductive layer M1 may form afirst integrated wiring structure.

Because a method of forming the via V1 and the first conductive layer M1on the first insulation layer I1 to form the first integrated wiringstructure is known to those of ordinary skill in the art, a detaileddescription thereof is omitted herein for the sake of brevity.

A second conductive layer M2, which may be connected to a second powerpad GND_P by a via V2 and separated from the first conductive layer M1,may be formed on the first insulation layer I1 (see FIG. 6B). The secondconductive layer M2 and the via V2 connected to the second conductivelayer M2 may form a second integrated wiring structure.

Because a method of forming the via V2 and the second conductive layerM2 on the first insulation layer I1 to form the second integrated wiringis known to those of ordinary skill in the art, a detailed descriptionthereof is also omitted herein.

The first conductive layer M1 and the second conductive layer M2 may beconductive metallic materials and/or their equivalents. A method offorming a semiconductor integrated circuit S_IC1B according to anexample embodiment of the present invention as shown in FIGS. 6A and 6Bmay be similar and/or identical to the method of forming semiconductorintegrated circuit S_IC1A illustrated in FIGS. 4A and 4B.

According to an example embodiment of the present invention as shown inFIG. 6C, a second insulation layer I2 may be formed on first and secondconductive layers M1, M2. A third conductive layer M3, which may beconnected to first conductive layer M1 by a via V3 may be formed on thesecond insulation layer I2.

The third conductive layer M3 and the via V3 connected to the thirdconductive layer M3 may form a third integrated wiring structure.Because a method of forming the via V3 and the third conductive layer M3on the second insulation layer I2 to form the third integrated wiringstructure is known to those of ordinary skill in the art, a detaileddescription thereof is omitted. The third conductive layer M3 may be aconductive metallic material and/or its equivalent.

According to an example embodiment of the present invention, the firstthrough third conductive layers M1, M2, M3 and second insulation layerI2 may combine to form a capacitor CAP1 as illustrated in FIG. 5.Accordingly, the first through third conductive layers M1, M2, M3 andthe second insulation layer I2 may be structured similar and/oridentical to the structure of capacitor CAP1 including an insulatingmaterial between two charged plates.

A capacitor CAP1 may receive and store electric charge from an electriccharge generator C and may generate a voltage. A capacitor CAP1 mayapply a voltage to a first power pad VCC_P through a first conductivelayer M1 and a via V1. A voltage applied to a first power pad VCC_P maybe used to operate electrical circuits 61.

A semiconductor integrated circuit S_IC1B having a structure inaccordance with an example embodiment of the present invention maycontrol a period of time during which voltage may be generated byadjusting an amount of electric charge stored in capacitor CAP1according to a function of the semiconductor integrated circuit S_IC2B.

FIG. 7 illustrates a semiconductor integrated circuit 700 according toan example embodiment of the present invention. In example embodimentsof the present invention as shown in FIGS. 3 and 5, semiconductorintegrated circuits S_IC1A, S_IC2A, S_IC3A, S_IC1B, S_IC2B, S_IC3Bhaving batteries B1, B2, B3 and/or capacitors CAP1, CAP2, CAP3, e.g.,voltage generators, are illustrated. However, the technical spirit ofthe present invention is not confined to semiconductor integratedcircuits S_IC1A, S_IC2A, S_IC3A, S_IC1B, S_IC2B, S_IC3B illustrated inthe example embodiments of the present invention as shown in FIGS. 3 and5.

In other words, the technical sprit of the present invention may beembodied in a semiconductor integrated circuit 700 of an exampleembodiment of the present invention as shown in FIG. 7, in which avoltage generator PG may be stacked on a plurality of semiconductorchips S1, S2, S3, S4.

Voltage generator PG, batteries B1, B2, B3 illustrated in an exampleembodiment of the present invention in FIG. 3, and capacitors CAP1,CAP2, CAP3 illustrated in an example embodiment of the present inventionin FIG. 5 may be formed of similar and/or identical material and havesimilar and/or identical functions.

Apart from the embodiments illustrated in example embodiments of thepresent invention as shown in FIGS. 4, 5, and 7, the technical spirit ofthe present invention may also be applied to a plurality ofsemiconductor chips mounted on a memory module through appropriatemodifications.

As described above, according to a semiconductor integrated circuit, asemiconductor system including the same, and a method of forming thesemiconductor integrated circuit, an independent voltage generator maybe stacked on each semiconductor circuit. Thus, the lifespan of thevoltage generator may vary according to the usage of each semiconductorcircuit, and the size of the semiconductor system may be reduced.

Although the example embodiments of the present invention have beendisclosed for illustrative purposes, those skilled in the art willappreciate that various modifications, additions and substitutions arepossible, without departing from the scope and spirit of the inventionas disclosed in the accompanying claims.

1. A method of forming a semiconductor integrated circuit, the methodcomprising: forming a plurality of electrical circuits and a pluralityof power pads on a semiconductor substrate; forming an insulation layeron the semiconductor substrate; forming a first conductive layer whichis connected to a first power pad by a first via on the insulationlayer; forming a second conductive layer on the insulation layer,wherein the second conductive layer is connected to a second power padby a second via and separated from the first conductive layer; andforming a layer of material that generates a voltage directly contactingthe first conductive layer and the second conductive layer, wherein thelayer of material, the first conductive layer and the second conductivelayer, collectively, form a battery.
 2. The method of claim 1, whereinthe layer of material provides the voltage without receiving an electriccharge from an external electric charge generator device.